Fairchild Semiconductor offers MEMS foundry services using Sandia National Laboratory's SUMMiT IV™ (4 layer poly) and SUMMiT V™ (5 layer poly) Surface Micromachining Processes at the South Portland, Maine 6” wafer fab.   Fairchild has offered the SUMMiT IV processes since 2001 and will be offering SUMMiT V beginning the second half of 2003.

The Fairchild Maine 6” wafer fab is a high volume world class IC fabrication facility in a class 1 clean room environment.  It is certified to QS9000 standards with low defect density and integrated Statistical Process Control methods within the electronic shop floor control system. This manufacturing facility is capable of processing 0.35 um critical dimension wafers in high volume.

SUMMiT™ is one of the most advanced Surface MEMS technologies in the world.  Fairchild is currently the only high volume production foundry to offer SUMMiT Technology.  The SUMMiT processes are well suited for telecom photonic switch applications, sensors, accelerometers, gyros, gears and RF switches.

As part of Fairchild's standard foundry services, customers receive post-design engineering support for reticle frame layout, GDS data fracture and electronic job-view to mask generation.   Design rules for both SUMMiT IV and SUMMiT V are currently available by contacting Fairchild Semiconductor.

Fairchild has a dedicated process development team to support MEMS customers’ prototype effort.  The process cycle time for MEMS prototype wafers is typically 4½ weeks.

Fairchild and Sandia are cooperating towards advancing the SUMMiT based technology and production capabilities.

Fairchild MEMS foundry is actively expanding the core technology to meet the upcoming RF MEMS foundry demand.

Fairchild MEMS foundry objectives:

• Develop industry standards for MEMS wafer foundry services to include high quality and leadtimes consistent with IC manufacturing
• Grow MEMS core process capabilities and design tools to reduce customer’s design to market cycle time
• Leverage both Fairchild internal IC manufacturing and external foundry knowledge to provide superior MEMS foundry customer support

For more information please contact:

Mary Chu
858-578-4689
mary.chu@fairchildsemi.com