MEMS Process Technology - Fairchild Semiconductor

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MEMS Technology

Fairchild Semiconductor foundry services offer Sandia National Laboratory's SUMMiT IV™ and SUMMiT V™ Surface Micromachining Processes. SUMMiT™ stands for Sandia Ultra-planar, Multi-level MEMS Technology. SUMMiT is a multi-layer polycrystalline silicon (polysilicon) surface micromachining process. SUMMiT IV is a four level polysilicon process and SUMMiT V is a five level polysilicon process.

SUMMiT technology uses oxide for sacrificial layers, and polysilicon for anchor and cantilever-beam structures. Polysilicon is an ideal material for surface MEMS structures; it is stronger, extremely flexible and resists fatigue. SUMMiT technology offers low stress nitride and highly planarized polysilicon structures.

SUMMiT technology can be used to build 3-D structure devices in a wide variety of applications, such as Sensors, Accelerometers, Gyros, Optical Switches, Display Mirrors, Gears and RF Switches.

SUMMiT technology utilizes one micron design rules and is compatible with modern IC fabrication processes.

Pop-up Mirror				Gears

Photo's courtesy of Sandia National Laboratories, Microsystems Center.

Go to Sandia MEMS web site for more information on SUMMiT Technology, short courses and agile prototyping. http://mems.sandia.gov/scripts/index.asp